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źŽħ Nano Indentation


 

STM Žħ

źŽħ

 

 

 


 

 

 

ǥĥ Žħ ۿ ġ ִ Ī AFM Žħ

 

AFM Žħ

 

ļ ִ Chip, Ǻ Ǿ ִCantilever, źtip

 

 

 

: : : : : https://www.nanotools.com/cms/upload/sketches/GLbiosphereQR.png

 

 

 

Biosphere źŽħ

 

Tip radius / r

Biosphere-Bxx-NCH

Biosphere-Bxx-FM

Biosphere-Bxx-CONT

20nm (+/-5nm)

Biosphere-B20-NCH

Biosphere-B20-FM

Biosphere-B20-CONT

30nm (+/-5nm)

Biosphere-B30-NCH

Biosphere-B30-FM

Biosphere-B30-CONT

40nm (+/-5nm)

Biosphere-B40-NCH

Biosphere-B40-FM

Biosphere-B40-CONT

50nm (+/-5nm)

Biosphere-B50-NCH

Biosphere-B50-FM

Biosphere-B50-CONT

100nm (+/-10nm)

Biosphere-B100-NCH

Biosphere-B100-FM

Biosphere-B100-CONT

150nm (+/-10nm)

Biosphere-B150-NCH

Biosphere-B150-FM

Biosphere-B150-CONT

300nm (+/-10nm)

Biosphere-B300-NCH

Biosphere-B300-FM

Biosphere-B300-CONT

500nm (+/-10nm)

Biosphere-B500-NCH

Biosphere-B500-FM

Biosphere-B500-CONT

750nm (+/-10nm)

Biosphere-B750-NCH

Biosphere-B750-FM

Biosphere-B750-CONT

1000nm (+/-10nm)

Biosphere-B1000-NCH

Biosphere-B1000-FM

Biosphere-B1000-CONT

1500nm (+/-10nm)

Biosphere-B1500-NCH

Biosphere-B1500-FM

Biosphere-B1500-CONT

2000nm (+/-10nm)

Biosphere-B2000-NCH

Biosphere-B2000-FM

Biosphere-B2000-CONT

Cantilever Parameter

NCHAu

FMAu

CONTAu

Material

Si

Si

Si

Length

125um

225um

450um

Width

30um

28um

50um

Thickness

4um

3um

2um

Force constant

40N/m

2.8N.m

0.2N/m

Resonance frequency

330kHz

75kHz

13kHz

Tip side coating

none

none

none

Back side coating

Au reflex

Au reflex

Au reflex

Chip Parameter

 

 

 

Length

3400um

3400um

3400um

Width

1600um

1600um

1600um

Thickness

315um

315um

315um

Alignment grooves

yes

yes

yes

 

 

 

 


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