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³ª³ëź¼ÒŽħ Spike small and sharp : MSS

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Extreme Aspect Ratio

High Aspect Ratio

Spike small and sharp

MCNT

 

 

 

 

Enhanced Resolution

Fast Scanning

3D CD Metrokogy

EBD-TESPA AFM Probes

 

 

 

 

High Resolution AFM Probes

Life Science

Nanoindentation

 

 


 

 

 

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°í¼º´É ³ª³ë°á°¢ÃøÁ¤À» AFM ±¸Çü Žħ

 

Á¤·Ä¼±ÀÌ ÀÖ´Â Chip, ±Ý ÇǺ¹ÀÌ µÇ¾î ÀÖ´Â Cantilever, ±¸¸éÀÇ Åº¼ÒtipÀ¸·Î ±¸¼º

 

 

 

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Spike small and sharp ź¼ÒŽħ »ç¾ç

 

HDC-40

HDC-30

HDC-20

MSS-soft 13 deg

MSS-soft 3 deg

MSS 4-Star NCH

Material

HDC/DLC

HDC/DLC

HDC/DLC

HDC/DLC

HDC/DLC

HDC/DLC

Shape

conical

conical

conical

conical

conical

spike

Tip length / l

400nm

300nm

250nm

250nm

250nm

100nm

Diameter / d

20nm

15nm

10nm

15nm

15um

10um

Half cone angle

<4 degrees

<3 degrees

<3 degrees

<2 degrees

<2 degrees

<6 degrees

Radius / r

2-3nm

2-3nm

2nm

<2nm

<2nm

<2nm

Tilt compensation

3 degrees

3 degrees

3 degrees

13 degrees

3 degrees

12 degrees

Pyramid height / PH

15um

15um

15um

15um

15um

15um

Tip set back / TSB

15um

15um

15um

15um

15um

15um

Cantilever Parameter

 

 

 

 

 

Material

Si

Si

Si

Si

Si

Si

Shape

NT-RTESPA

NT-RTESPA

NT-RTESPA

NT-RTESPA

NT-RTESPA

NT-NCH

Length

120um

120um

120um

225um

225um

120um

Width

30um

30um

30um

28um

28um

30um

Thickness

4.4um

4.4um

4.4um

3um

3um

4.4um

Force constant

40N/m

40N/m

40N/m

2.8N/m

2.8N/m

40N/m

Resonance frequency

320kHz

320kHz

320kHz

75kHz

75kHz

320kHz

Tip side coating

none

none

none

none

none

none

Back side coating

reflex

none

none

reflex

reflex

reflex

Chip Parameter

 

 

 

 

 

 

Length

3400um

3400um

3400um

3400um

3400um

3400um

Width

1600um

1600um

1600um

1600um

1600um

1600um

Thickness

315um

315um

315um

315um

315um

315um

Alignment grooves

no

no

no

yes

yes

no

 

 

 

 


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