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½Ç¸®ÄÜ(Si,
Oxide) ±â¹Ý ´ÙÀ̾Ƹóµå ¿þÀÌÆÛµéÀ» ¼Ò°³ÇÕ´Ï´Ù. ´ÙÀ̾Ƹóµå ¿þÀÌÆÛµéÀº
¸ðµÎ ADTÀÇ Æ¯Çã»óÇ¥ÀÎ UNCD Aqua ÀçÁúÀÔ´Ï´Ù. UNCD Aqua
Çʸ§Àº Àü±âÀý¿¬ ¼ø¼ö»óÅ ³ª³ë°áÁ¤¹Ú¸·ÀÔ´Ï´Ù. ´Ù¸¥ ȸ»çÀÇ ³ª³ë°áÁ¤
´ÙÀ̾Ƹóµå´Â ´ëü·Î °áÁ¤´ÙÀ̾ƸóµåÁ¶Á÷°ú ³»ºÎÀûÀ¸·Î ¼¯¾îÀÖ´Â
Èæ¿¬°áÇÕÀç·áµé·Î ÀÌ·ç¾îÁ® Àִµ¥ ¹ÝÇØ UNCD Aqua ¹Ú¸·Àº ¹«Á¤Áú
Èæ¿¬»óŸ¦ °¡Áö°í ÀÖÁö ¾Ê½À´Ï´Ù. µû¶ó¼ °æµµ, ź¼ºÀ²°ú ´Ù¸¥
ÀÚ¿¬ ´ÙÀ̾ƸóµåÀÇ Æ¯¼ºµéÀ» °¡Áö¸é¼ ¶ÇÇÑ ¸Å²öÇÏ°í ¸Å¿ì ³·Àº
³»ºÎÀÀ·ÂÀ» °¡Áö°í ÀÖ½À´Ï´Ù.
- UNCD
Aqua 25 : ¾ã°í Ç¥¸é°ÅÄ¥±â°¡ ´ë·« 7 nm rmsÀÇ ¸Å²ô·¯¿î
UNCD ¹Ú¸·. MEMS ¼ÒÀÚ¿Í ¸Å²ô·¯¿î ³ª³ë±â¼ú Àû¿ë¿¡ ÀûÇÕ.
- UNCD
Aqua 50 : »ê¾÷ü¿¡¼ ³·Àº ¸¶Âû ÇǸ· Àû¿ëÀ» À§ÇÑ ÃÖ»óÀÇ ¸¶Âû°øÇÐÀû
UNCD film.
- UNCD
Aqua 100 : °¡Àå ³ôÀº ¿ÀüµµÀ² UNCD·Î¼ ¿Àü´Þ°ú Åõ¸í¼º Àû¿ë¿¡
ÀûÇÕ.
´ÙÀ̾Ƹóµå
ÄÚÆÃ ¼ºñ½º : ´ÙÀ̾Ƹóµå
ÄÚÆÃ ¼ºñ½º¸¦ Á¦°øÇÕ´Ï´Ù. ´ÙÀ̾Ƹóµå ÇǸ·À» ÀÔÈ÷·Á´Â ¹°Ã¼ÀÇ
Å©±â¿Í ÀçÁú, ÄÚÆÃÇÒ ºÎÀ§, ÄÚÆÃ µÎ²², ½ÇÇèÁ¶°Ç, Àû¿ëºÐ¾ß µî
Á¦¹Ý»çÇ×À» ¾Ë·ÁÁֽñ⠹ٶø´Ï´Ù.
| UNCD
Horizen Á¦Ç°º° »ó¼¼»ç¾ç
- Ç¥¸é°ÅÄ¥±â
1 nm ÀÌÇÏÀÇ ÃÖ»óÀÇ ¸Å²ô·¯¿î ¹Ú¸·
- DoSi
: Diamond on Silicon Wafers, DOI : Diamond on Oxide Wafers
|

|
|
Product
Code
|
UNCD
Product
|
Wafer
size
(mm)
|
Wafer
type
|
Oxide
layer
(um SiO2)
|
Thinckness
(um)
|
|
HA25-001-0-p1
|
Aqua
25
|
Die-1
cm x cm
|
DoSi
|
-
|
0.1
|
|
HA25-001-0-p2
|
Aqua
25
|
Die-1
cm x cm
|
DoSi
|
-
|
0.2
|
|
HA25-001-0-p3
|
Aqua
25
|
Die-1
cm x cm
|
DOI
|
1
|
0.3
|
|
HA25-001-0-1
|
Aqua
25
|
Die-1
cm x cm
|
DoSi
|
-
|
1
|
|
HA25-001-0-2
|
Aqua
25
|
Die-1
cm x cm
|
DoSi
|
-
|
2
|
|
HA25-100-0-1
|
Aqua
25
|
100
|
DoSi
|
-
|
1
|
|
HA25-100-0-2
|
Aqua
25
|
100
|
DoSi
|
-
|
2
|
| UNCD
Lightening Á¦Ç°º° »ó¼¼»ç¾ç
- Àüµµ¼º
´ÙÀ̾Ƹóµå ¿þÀÌÆÛ
- 0.1
ohm-cmÀÇ ÀúÇ×À²À» °¡Áü
|

|
|
Product
Code
|
UNCD
Product
|
Wafer
size
(mm)
|
Wafer
type
|
Oxide
layer
(um SiO2)
|
Thinckness
(um)
|
|
UL25-100-1-p1
|
Lightning
25
|
100
|
DOI
|
1
|
0.1
|
|
UL25-100-1-p3
|
Lightning
25
|
100
|
DOI
|
1
|
0.3
|
|
UL25-100-1-p5
|
Lightning
25
|
100
|
DOI
|
1
|
0.5
|
|
UL25-100-1-1
|
Lightning
25
|
100
|
DOI
|
1
|
1
|
|
UL25-100-1-2
|
Lightning
25
|
100
|
DOI
|
1
|
2
|
| UNCD
Diamond Windows Á¦Ç°º° »ó¼¼»ç¾ç
- window
size 300 um x um
- MEMS
°³¹ß, ¸¶Âû½ÃÇè, µ¶Ã¢ÀûÀÎ ³ª³ë¹üÀ§ °øÁ¤ Àû¿ë
|

|
|
Product
Code
|
UNCD
Product
|
Wafer
size
(mm)
|
Wafer
type
|
Oxide
layer
(um SiO2)
|
Thinckness
(um)
|
|
WA25-100-1-p1
|
Aqua
25
|
Die-1.5
cm x cm
|
DOI
|
1
|
0.07
|
| DoSi
Wafer Á¦Ç°º° »ó¼¼»ç¾ç
- DoSi
: Diamond on Silicon Wafers
- Wafer
size 100 mm, 150 mm, 200 mm, 300 mm
|

|
|
Product
Code
|
UNCD
Product
|
Wafer
size
(mm)
|
Wafer
type
|
Oxide
layer
(um SiO2)
|
Thinckness
(um)
|
|
UA25-100-0-p1
|
Aqua
25
|
100
|
DoSi
|
-
|
0.1
|
|
UA25-100-0-p2
|
Aqua
25
|
100
|
DoSi
|
-
|
0.2
|
|
UA25-100-0-p3
|
Aqua
25
|
100
|
DoSi
|
-
|
0.3
|
|
UA25-100-0-p1
|
Aqua
25
|
100
|
DoSi
|
-
|
1
|
|
UA25-100-0-2
|
Aqua
25
|
100
|
DoSi
|
-
|
2
|
|
UA25-100-0-p3
|
Aqua
25
|
150
|
DoSi
|
-
|
0.3
|
|
UA25-100-0-1
|
Aqua
25
|
150
|
DoSi
|
-
|
1
|
|
UA25-100-0-p3
|
Aqua
25
|
200
|
DoSi
|
-
|
0.3
|
|
UA25-100-0-p1
|
Aqua
25
|
200
|
DoSi
|
-
|
1
|
|
UA50-100-0-1
|
Aqua
50
|
100
|
DoSi
|
-
|
1
|
|
UA50-150-0-1
|
Aqua
50
|
150
|
DoSi
|
-
|
1
|
|
UA50-200-0-1
|
Aqua
50
|
200
|
DoSi
|
-
|
1
|
|
UA100-100-0-1
|
Aqua
100
|
100
|
DoSi
|
-
|
1
|
|
UA100-150-0-1
|
Aqua
100
|
150
|
DoSi
|
-
|
1
|
|
UA100-200-0-1
|
Aqua
100
|
200
|
DoSi
|
-
|
1
|
| DOI
Wafer Á¦Ç°º° »ó¼¼»ç¾ç
- DOI
: Diamond on Oxide Wafers
- Wafer
size 100 mm, 150 mm, 200 mm, 300 mm
|

|
|
Product
Code
|
UNCD
Product
|
Wafer
size
(mm)
|
Wafer
type
|
Oxide
layer
(um SiO2)
|
Thinckness
(um)
|
|
UA25-100-1-p1
|
Aqua
25
|
100
|
DOI
|
-
|
0.1
|
|
UA25-100-1-p2
|
Aqua
25
|
100
|
DOI
|
-
|
0.2
|
|
UA25-100-1-p3
|
Aqua
25
|
100
|
DOI
|
-
|
0.3
|
|
UA25-100-1-p1
|
Aqua
25
|
100
|
DOI
|
-
|
1
|
|
UA25-100-1-2
|
Aqua
25
|
100
|
DOI
|
-
|
2
|
|
UA25-100-1-p3
|
Aqua
25
|
150
|
DOI
|
-
|
0.3
|
|
UA25-100-1-1
|
Aqua
25
|
150
|
DOI
|
-
|
1
|
|
UA25-100-1-p3
|
Aqua
25
|
200
|
DOI
|
-
|
0.3
|
|
UA25-100-1-p1
|
Aqua
25
|
200
|
DOI
|
-
|
1
|
|
UA50-100-1-1
|
Aqua
50
|
100
|
DOI
|
-
|
1
|
|
UA50-150-1-1
|
Aqua
50
|
150
|
DOI
|
-
|
1
|
|
UA50-200-1-1
|
Aqua
50
|
200
|
DOI
|
-
|
1
|
|
UA100-100-1-1
|
Aqua
100
|
100
|
DOI
|
-
|
1
|
|
UA100-150-1-1
|
Aqua
100
|
150
|
DOI
|
-
|
1
|
|
UA100-200-1-1
|
Aqua
100
|
200
|
DOI
|
-
|
1
|
|
|