CVD ̾Ƹ

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Si, SiO2 ݾ ̾Ƹ ü մϴ. Optical Grade Thermal Grade е˴ϴ. Optical Grade CVD Diamond ٰ ܰ ֽϴ.

 

Optical Grade

 

- Optical grade : 1700 - 1800 w/mK, clear

- Polished, finish <10 nm on both sides

- Poly Crystalline

- :

- 簢

- : 8, 10, 12, 20, 30, 40, 50 mm (+-0.2 mm)

- : 8 x 8, 10 x 10, 12 x 12, 20 x 20, 30 x 30, 40 x 40, 50 x 50 mm (+-0.2 mm)

- β : 150 um, 300 um, 500 um

- ٸ ũ ֹ

 

- Single Crystal <100>, <110>ε ް

- ǥĥ : <5nm

- Ǵ : ִ 7.5 mm Ǵ 7.5 x 7.5 mm ( <100>)

- Ǵ : ִ 4 mm Ǵ 4 x 4 mm ( <110>)

 

 

 

 

Thermal Grade

 

- Thermal grade : 900 - 1000 w/mK, opaque

- Polished, finish <10 nm on both sides

- Poly Crystalline

- :

- 簢

- : 8, 10, 12, 20, 30, 40, 50 mm (+-0.2 mm)

- : 8 x 8, 10 x 10, 12 x 12, 20 x 20, 30 x 30, 40 x 40, 50 x 50 mm (+-0.2 mm)

- β : 150 um, 300 um, 500 um

- ٸ ũ ֹ

 

 

 ̾Ƹ (Si, SiO2 )

 

Ǹ(Si, Oxide ) ̾Ƹ ۵ Ұմϴ. ̾Ƹ ۵ ADT Ưǥ UNCD Aqua Դϴ. UNCD Aqua ʸ ڸԴϴ. ٸ ȸ  ̾Ƹ ü ̾Ƹ ִ 濬 ̷ ִµ UNCD Aqua ڸ 濬¸ ʽϴ. 浵, ź ٸ ڿ ̾Ƹ Ư 鼭 Ųϰ ſ ֽϴ.

  • UNCD Aqua 25 : ǥĥⰡ 뷫 7 nm rms Ų UNCD ڸ. MEMS ڿ Ų 뿡 .
  • UNCD Aqua 50 : ü Ǹ ֻ UNCD film.
  • UNCD Aqua 100 : UNCDμ ް 뿡 .

                   

 

ǰ ֿ

 

Substrate : Si

Product Code

UNCD type

Wafer size

(mm)

Wafer type

Thinckness

(um)

UA25-100-0-p3

Aqua 25

100

Si

0.3

UA25-100-0-1

Aqua 25

100

Si

1

UA25-100-0-2

Aqua 25

100

Si

2

UA25-100-0-1

Aqua 100

100

Si

1

 

Substrate : SiO2

Product Code

UNCD type

Wafer size

(mm)

Wafer type

Thinckness

(um)

UA25-100-1-p3

Aqua 25

100

SiO2

0.3

UA25-100-1-1

Aqua 25

100

SiO2

1

UA25-100-1-2

Aqua 25

100

SiO2

2

UA25-100-1-1

Aqua 100

100

SiO2

1

 

Substrate : Si, Lightning : ̾Ƹ , 0.1 ohm-cm

Product Code

UNCD type

Wafer size

(mm)

Wafer type

Thinckness

(um)

UA25-100-1-p3

Lightning 25

100

Si

0.3

UA25-100-1-1

Lightning 25

100

Si

1

UA25-100-1-2

Lightning 25

100

Si

2

 

Substrate : Si, Horizen : ǥĥ 1 nm ְ Ų ڸ

Product Code

UNCD type

Wafer size

(mm)

Wafer type

Thinckness

(um)

HA25-001-0-1

Horizen 25

10 x 10 die cut

Si

1

HA25-001-0-2

Horizen 25

10 x 10 die cut

Si

2

HA25-001-0-p3

Horizen 25

10 x 10 die cut

Si

0.3

HA25-001-0-1

Horizen 100

100

Si

1

 

 

 ̾Ƹü

 

̾Ƹ 񽺸 մϴ. ̾Ƹ Ǹ ü ũ , , β, , о  ݻ ˷ֽñ ٶϴ.

 

 


ITB CORPORATION

 

website : www.itbco.co.kr

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