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Mikromasch AFM Probe

 

AFM Probe, ũθŽ ̰ ĵƿ

 

- Non Contact / Tapping Mode

- Contact Mode

- Tipless Cantilever

- Serial HARD

- DPER / DPET

- Conductive Non Contact Mode

- Conductive Contact Mode

- Magnetic Force Mode

- High Resolution

- Test Structure

 

 

 

 

 

 

 

 

 


 

 

High Resolution silicon probes

 

Hi'Res-C14, C15, C19

 

 

Spike radius : <1 nm

Spike height : 100 - 200 nm

Spike material : diamond like

Au overall coating : 30 nm

Cr overall coating : 20 nm

 

 

 

 

Cantilever

 

Resonant Frequency, kHz

Spring Constant, N/m

length

µm

width

µm

thickness

µm

min

typ

max

min

typ

max

C14

110

160

220

1.8

5.0

13

125

25

2.1

C15

265

325

410

20

40

80

125

30

4.0

C19

25

65

120

0.05

0.5

2.3

125

22.5

1.0

 

 


ITB CORPORATION

 

website : www.itbco.co.kr

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tel : 02-549-8501

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