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Mikromasch AFM Probe

 

AFM Probe, ũθŽ ̰ ĵƿ

 

- Non Contact / Tapping Mode

- Contact Mode

- Tipless Cantilever

- Serial HARD

- DPER / DPET

- Conductive Non Contact Mode

- Conductive Contact Mode

- Magnetic Force Mode

- High Resolution

- Test Structure

 

 

 

 

 

 

 

 

 


 

 

Hardened DLC coated silicon probe

 

Serial HARD

 

 

  

Typical tip radius : 20 nm

Tipside coating : DLC 20nm

Backsideb coating : Al 30nm

 

 

 

 

HQ:NSC14/Hard/Al BS

 

Cantilever

 

Resonant Frequency, kHz

Spring Constant, N/m

length

µm

width

µm

thickness

µm

min

typ

max

min

typ

max

14 Series

110

160

220

1.8

5.0

13

125

25

2.1

 

 

HQ:NSC15/Hard/Al BS

 

Cantilever

 

Resonant Frequency, kHz

Spring Constant, N/m

length

µm

width

µm

thickness

µm

min

typ

max

min

typ

max

15 Series

265

325

410

20

40

80

125

30

4.0

 

 

HQ:NSC16/Hard/Al BS

 

Cantilever

 

Resonant Frequency, kHz

Spring Constant, N/m

length

µm

width

µm

thickness

µm

min

typ

max

min

typ

max

16 Series

170

190

210

30

45

70

225

37.5

7.0

 

 

HQ:CSC17/Hard/Al BS

 

Cantilever

 

Resonant Frequency, kHz

Spring Constant, N/m

length

µm

width

µm

thickness

µm

min

typ

max

min

typ

max

17 Series

10

13

17

0.06

0.18

0.40

450

50

2.0

 

 

HQ:NSC35/Hard/Al BS : 3 levers

 

Cantilever

 

Resonant Frequency, kHz

Spring Constant, N/m

length

µm

width

µm

thickness

µm

min

typ

max

min

typ

max

35 Series

130

185

95

205

300

150

290

430

205

2.7

4.8

1.7

8.9

16

5.4

24

44

14

110

90

130

35

2.0

 

 

HQ:NSC36/Hard/Al BS : 3 levers

 

Cantilever

 

Resonant Frequency, kHz

Spring Constant, N/m

length

µm

width

µm

thickness

µm

min

typ

max

min

typ

max

36 Series

30

45

25

90

130

65

160

240

115

0.1

0.2

0.06

1.0

2

0.6

4.6

9

2.7

110

90

130

32.5

1.0

 

 

HQ:XSC/Hard/Al BS : 4 levers

 

Cantilever

 

Resonant Frequency, kHz

Spring Constant, N/m

length

µm

width

µm

thickness

µm

min

typ

max

min

typ

max

11 Series

12

60

115

250

15

80

155

350

18

100

200

465

0.1

1.1

3

17

0.2

2.7

7

42

0.4

5.6

16

90

500

210

150

100

30

30

30

50

2.7

 

 


ITB CORPORATION

 

website : www.itbco.co.kr

email : sales@itbco.co.kr

tel : 02-549-8501

fax : 02-549-8502