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Mikromasch AFM Probe

 

AFM Probe, ũθŽ ̰ ĵƿ

 

- Non Contact / Tapping Mode

- Contact Mode

- Tipless Cantilever

- Serial HARD

- DPER / DPET

- Conductive Non Contact Mode

- Conductive Contact Mode

- Magnetic Force Mode

- High Resolution

- Test Structure

 

 

 

 

 

 

 


 

 

Tipless Cantilever

 

 

  

Tip radius : less than 8 nm

Tip material : Silicon

 

 

 

 

HQ:NSC35 : 3 levers

available coating : none, backside Al 30nm, backside Cr-Au Au 30nm on Cr 20nm sublayer

 

Cantilever

 

Resonant Frequency, kHz

Spring Constant, N/m

length

µm

width

µm

thickness

µm

min

typ

max

min

typ

max

35 Series

130

185

95

205

300

150

290

430

205

2.7

4.8

1.7

8.9

16

5.4

24

44

14

110

90

130

35

2.0

 

 

HQ:NSC36 : 3 levers

available coating : none, backside Al 30nm, backside Cr-Au Au 30nm on Cr 20nm sublayer

 

Cantilever

 

Resonant Frequency, kHz

Spring Constant, N/m

length

µm

width

µm

thickness

µm

min

typ

max

min

typ

max

36 Series

30

45

25

90

130

65

160

240

115

0.1

0.2

0.06

1.0

2

0.6

4.6

9

2.7

110

90

130

32.5

1.0

 

 

HQ:CSC37 : 3 levers

available coating : none, backside Al 30nm

 

Cantilever

 

Resonant Frequency, kHz

Spring Constant, N/m

length

µm

width

µm

thickness

µm

min

typ

max

min

typ

max

37 Series

30

15

20

40

20

30

55

30

40

0.3

0.1

0.1

0.8

0.3

0.4

2

0.6

1

250

350

300

35

2.0

 

 

HQ:CSC38 : 3 levers

available coating : none, backside Al 30nm

 

Cantilever

 

Resonant Frequency, kHz

Spring Constant, N/m

length

µm

width

µm

thickness

µm

min

typ

max

min

typ

max

38 Series

8

5

6

20

10

14

32

17

23

0.01

0.003

0.005

0.09

0.03

0.05

0.36

0.13

0.21

250

350

300

32.5

1.0

 

 


ITB CORPORATION

 

website : www.itbco.co.kr

email : sales@itbco.co.kr

tel : 02-549-8501

fax : 02-549-8502