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Mikromasch AFM Probe

 

AFM Probe, ũθŽ ̰ ĵƿ

 

- Non Contact / Tapping Mode

- Contact Mode

- Tipless Cantilever

- Serial HARD

- DPER / DPET

- Conductive Non Contact Mode

- Conductive Contact Mode

- Magnetic Force Mode

- High Resolution

- Test Structure

 

 

 

 

 

 

 


 

 

Contact Mode

 

 

Tip radius : less than 8 nm

Tip material : Silicon

 

 

 

 

HQ:CSC17

available coating : none, backside Al 30nm

 

Cantilever

 

Resonant Frequency, kHz

Spring Constant, N/m

length

µm

width

µm

thickness

µm

min

typ

max

min

typ

max

17 Series

10

13

17

0.06

0.18

0.40

450

50

2.0

 

 


 

 

Tip radius : less than 8 nm

Tip material : Silicon

 

 

HQ:CSC37 : 3 levers

available coating : none, backside Al 30nm

 

Cantilever

 

Resonant Frequency, kHz

Spring Constant, N/m

length

µm

width

µm

thickness

µm

min

typ

max

min

typ

max

37 Series

30

15

20

40

20

30

55

30

40

0.3

0.1

0.1

0.8

0.3

0.4

2

0.6

1

250

350

300

35

2.0

 

 

HQ:CSC38 : 3 levers

available coating : none, backside Al 30nm

 

Cantilever

 

Resonant Frequency, kHz

Spring Constant, N/m

length

µm

width

µm

thickness

µm

min

typ

max

min

typ

max

38 Series

8

5

6

20

10

14

32

17

23

0.01

0.003

0.005

0.09

0.03

0.05

0.36

0.13

0.21

250

350

300

32.5

1.0

 

 


ITB CORPORATION

 

website : www.itbco.co.kr

email : sales@itbco.co.kr

tel : 02-549-8501

fax : 02-549-8502