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Mikromasch AFM Probe

 

AFM Probe, ũθŽ ̰ ĵƿ

 

- Non Contact / Tapping Mode

- Contact Mode

- Tipless Cantilever

- Serial HARD

- DPER / DPET

- Conductive Non Contact Mode

- Conductive Contact Mode

- Magnetic Force Mode

- High Resolution

- Test Structure

 

 

 

 

 

 

 


 

 

HOPG, Highly Ordered Pyrolitic Graphite

 

 

        

 

 

 

 

Grade

Mosaic Spread

Side

thickness

Chip size

Application

 

Value

Accuracy

 

mm

mm

 

ZYA

0.4 degree

+-0.1 degree

Double

1, 2

10 x 10

SPM, X-ray

ZYB

0.8 degree

+-0.2 degree

Double

Single

1, 2

1.5

10 x 10

SPM, X-ray

SPM

ZYH

3.5 degree

+-0.5 degree

Double

1, 1.5, 1.75, 2

10 x 10

SPM, X-ray

 

 

TGX Series, Grating for Lateral Characterization

 

 

    

 

 

Part No.

Pitch

Step Height

Active Area

Chip Dimension

 

Value

Accuracy

um

mm

mm

TGX

3.0 um

0.1 um

1.0

1 x 1

5 x 5 x 0.3

 

 

TGXYZ Series, Calibration Gratings

 

 

    

 

 

Part No.

Step Height

Pitch

Active Area

Chip Dimension

 

nm

Accuracy

um

mm

mm

TGXYZ01

20

2 %

5, 10

1 x 1

5 x 5 x 0.3

TGXYZ02

100

3 %

5, 10

1 x 1

5 x 5 x 0.3

TGXYZ03

500

3 %

5, 10

1 x 1

5 x 5 x 0.3

 

 


ITB CORPORATION

 

website : www.itbco.co.kr

email : sales@itbco.co.kr

tel : 02-549-8501

fax : 02-549-8502