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Carbon Nano tip

 

źҳŽħ

 

- Extream Aspect Ratio

- Enhanced Resolution

- 3D Metrology

- Life Science

- High Speed AFM

- High Resolution AFM

- Nanoindentation

 

 

 

 

 

 

 

 

 

 


 

 

Extream Aspect Ratio

 

 

EBD2-100

M1

M-CIS

HDC Trench

 

 

 

 

 

 

 

 

MSS Pattern Media

M-Cylinder

M-CNT

 

 

 

EBD2-100_NCH_13

 

Žħ

 

Shape

Tip length (I)

Tip diameter (d)

Tip radius

Tilt

Height (PH)

Tip set back (TSB)

conical

2000 nm

100 nm

< 5 nm

13 degree

15 um

15 um

 

ĵƿ

 

Type

Shape

Force Const.

Resonance Frq.

Length

Width

Thickness

TESP/NCH

beam

42 n/N

320 kHz

125 um

30 um

4 um

 

 

EBD2-100_NCH_3

 

Žħ

 

Shape

Tip length (I)

Tip diameter (d)

Tip radius

Tilt

Height (PH)

Tip set back (TSB)

conical

2000 nm

100 nm

< 5 nm

33 degree

15 um

15 um

 

ĵƿ

 

Type

Shape

Force Const.

Resonance Frq.

Length

Width

Thickness

TESP/NCH

beam

42 n/N

320 kHz

125 um

30 um

4 um

 

 

EBD2-100_NCHR_3

 

Žħ

 

Shape

Tip length (I)

Tip diameter (d)

Tip radius

Tilt

Height (PH)

Tip set back (TSB)

conical

2000 nm

100 nm

< 5 nm

3 degree

15 um

15 um

 

ĵƿ (back side : 30 nm Al reflex coating)

 

Type

Shape

Force Const.

Resonance Frq.

Length

Width

Thickness

TESP/NCH

beam

42 n/N

320 kHz

125 um

30 um

4 um

 

 

M1_NCH_13

 

Žħ

 

Shape

Tip length (I)

Tip diameter (d)

Tip radius

Tilt

Height (PH)

Tip set back (TSB)

conical

800 nm

70 nm

< 5 nm

13 degree

15 um

15 um

 

ĵƿ

 

Type

Shape

Force Const.

Resonance Frq.

Length

Width

Thickness

TESP/NCH

beam

42 n/N

320 kHz

125 um

30 um

4 um

 

 

M1-ESD_NCH_13

 

Žħ

 

Shape

Tip length (I)

Tip diameter (d)

Tip radius

Tilt

Height (PH)

Tip set back (TSB)

conical

800 nm

70 nm

< 5 nm

13 degree

15 um

15 um

 

ĵƿ

 

Type

Shape

Force Const.

Resonance Frq.

Length

Width

Thickness

TESP/NCH

beam

42 n/N

320 kHz

125 um

30 um

4 um

 

 

MCIS_NCHR_13

 

Žħ

 

Shape

Tip length (I)

Tip diameter (d)

Tip radius

Tilt

Height (PH)

Tip set back (TSB)

conical

400 nm

n/a

< 10 nm

13 degree

15 um

15 um

 

ĵƿ (back side : 30 nm Al reflex coating)

 

Type

Shape

Force Const.

Resonance Frq.

Length

Width

Thickness

TESP/NCHR

beam

40 n/N

340 kHz

125 um

35 um

4 um

 

 

HDC40_NCHR_13

 

Žħ

 

Shape

Tip length (I)

Tip diameter (d)

Tip radius

Tilt

Height (PH)

Tip set back (TSB)

conical

400 nm

22nm

< 2-3 nm

13 degree

15 um

15 um

 

ĵƿ (back side : 30 nm Al reflex coating)

 

Type

Shape

Force Const.

Resonance Frq.

Length

Width

Thickness

TESP/NCHR

beam

40 n/N

340 kHz

125 um

35 um

4 um

 

 

HDC30_NCHR_3

 

Žħ

 

Shape

Tip length (I)

Tip diameter (d)

Tip radius

Tilt

Height (PH)

Tip set back (TSB)

conical

300 nm

18nm

< 2-3 nm

3 degree

15 um

15 um

 

ĵƿ (back side : 30 nm Al reflex coating)

 

Type

Shape

Force Const.

Resonance Frq.

Length

Width

Thickness

TESP/NCHR

beam

40 n/N

340 kHz

125 um

35 um

4 um

 

 

MSS_FMR_13

 

Žħ

 

Shape

Tip length (I)

Tip diameter (d)

Tip radius

Tilt

Height (PH)

Tip set back (TSB)

conical

400 nm

15 nm

< 2 nm

13 degree

15 um

15 um

 

ĵƿ (back side : Al reflex coating)

 

Type

Shape

Force Const.

Resonance Frq.

Length

Width

Thickness

FMR

beam

2.8 n/N

75 kHz

225 um

28 um

3 um

 

 

MSS_FMR_3

 

Žħ

 

Shape

Tip length (I)

Tip diameter (d)

Tip radius

Tilt

Height (PH)

Tip set back (TSB)

conical

400 nm

15 nm

< 2 nm

3 degree

15 um

15 um

 

ĵƿ (back side : Al reflex coating)

 

Type

Shape

Force Const.

Resonance Frq.

Length

Width

Thickness

FMR

beam

2.8 n/N

75 kHz

225 um

28 um

3 um

 

 

MC90-70_ArrowNCR_3

 

Žħ

 

Shape

Tip length (I)

Tip diameter (d)

Tip radius

Tilt

Height (PH)

Tip set back (TSB)

cylinderical

800 nm

55 nm

< 5 nm

3 degree

15 um

5.2 um

 

ĵƿ ((back side : 30 nm Al reflex coating)

 

Type

Shape

Force Const.

Resonance Frq.

Length

Width

Thickness

ArrowNC

beam

42 n/N

285 kHz

160 um

45 um

4 um

 

 

MC60_ArrowNCR_3

 

Žħ

 

Shape

Tip length (I)

Tip diameter (d)

Tip radius

Tilt

Height (PH)

Tip set back (TSB)

cylinderical

500 nm

30 nm

< 5 nm

3 degree

15 um

5.2 um

 

ĵƿ ((back side : 30 nm Al reflex coating)

 

Type

Shape

Force Const.

Resonance Frq.

Length

Width

Thickness

ArrowNC

beam

42 n/N

285 kHz

160 um

45 um

4 um

 

 

CNT500_NCHR_3

 

Žħ

 

Shape

Tip length (I)

Tip diameter (d)

Tip radius

Tilt

Height (PH)

Tip set back (TSB)

cylinderical

500 nm

30 nm

<5 nm

3 degree

15 um

15 um

 

ĵƿ

 

Type

Shape

Force Const.

Resonance Frq.

Length

Width

Thickness

TESP/NCHR

beam

40 n/N

340 kHz

125 um

35 um

4 um

 

 

CNT400_NCHR_3

 

Žħ

 

Shape

Tip length (I)

Tip diameter (d)

Tip radius

Tilt

Height (PH)

Tip set back (TSB)

cylinderical

400 nm

22 nm

<5 nm

3 degree

15 um

15 um

 

ĵƿ

 

Type

Shape

Force Const.

Resonance Frq.

Length

Width

Thickness

TESP/NCHR

beam

40 n/N

340 kHz

125 um

35 um

4 um

 

 

CNT300_NCHR_3

 

Žħ

 

Shape

Tip length (I)

Tip diameter (d)

Tip radius

Tilt

Height (PH)

Tip set back (TSB)

cylinderical

300 nm

18 nm

<5 nm

3 degree

15 um

15 um

 

ĵƿ

 

Type

Shape

Force Const.

Resonance Frq.

Length

Width

Thickness

TESP/NCHR

beam

40 n/N

340 kHz

125 um

35 um

4 um

 

 

CNT150-BR_NCHR_3

 

Žħ

 

Shape

Tip length (I)

Tip diameter (d)

Tip radius

Tilt

Height (PH)

Tip set back (TSB)

cylinderical

150 nm

10 nm

<2 nm

3 degree

15 um

15 um

 

ĵƿ

 

Type

Shape

Force Const.

Resonance Frq.

Length

Width

Thickness

TESP/NCHR

beam

40 n/N

340 kHz

125 um

35 um

4 um

 

 

CNT100_NCHR_3

 

Žħ

 

Shape

Tip length (I)

Tip diameter (d)

Tip radius

Tilt

Height (PH)

Tip set back (TSB)

cylinderical

100 nm

10 nm

<2 nm

3 degree

15 um

15 um

 

ĵƿ

 

Type

Shape

Force Const.

Resonance Frq.

Length

Width

Thickness

TESP/NCHR

beam

40 n/N

340 kHz

125 um

35 um

4 um

 

 


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